(주)원우시스템즈

Specifications
Wavelength range	380-780 nm (standard) or 450-900 nm (optional)
Optical resolution	4.0 nm FWHM
Accuracy	0.1 nm thickness; 0.005% refractive index
Angle of incidence	70 ˚
Film thickness	1-5000 nm for single transparent film
Spot size	2 mm x 4 mm (standard) or 200 μm x 400 μm (optional)
Sampling time	3-15 seconds (minimum)
Kinetic logging	3 seconds
Mechanical tolerance (height)	+/- 1.5 mm, angle +/- 1.0 ˚
Number of layers	Up to 32 layers
Reference	Not applicable