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NanoCalc Thin Film Reflectometry System
Spectroscopic Reflectometry Systems
 
제조사 Mikropack GmbH
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NANOCALC-VIS
Wavelength 400-850 nm
Thickness 50 nm-20 μm
Light source Tungsten Halogen
NANOCALC-XR
Wavelength 250-1050 nm
Thickness 10 nm-100 μm
Light source Deuterium and Tungsten Halogen
NANOCALC-DUV
Wavelength 200-1100 nm
Thickness 1 nm-100 μm
Light source Deuterium and Tungsten Halogen
Specifications
Angle of incidence 90 ˚
Number of layers 3 or fewer
Reference measurement needed Yes (bare substrate)
Transparent materials Yes
Transmission mode Yes
Rough materials Yes
Measurement speed 100 milliseconds to 1 second
On-line possibilities Yes
Mechanical tolerance (height) With new reference or collimation (74-UV)
Mechanical tolerance (angle) Yes, with new reference
Microspot option Yes, with microscope
Vision option Yes, with microscope
Mapping option 6" and 12" XYZ mapping tables
Vacuum possibilities Yes
 
 
 
 
 
07072 서울시 동작구 신대방1가길 38 (신대방 719번지 동작상떼빌) 106동 209호 (주)원우시스템즈
TEL : 02-533-6720, 02-3289-1290  FAX : 02-3289-1293
Santevill 106-209, 38, Shindaebang1ga-gil, Dongjak, Seoul, 07072, South Korea
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