HOME > 제품소개 > 광학측정시스템 > Ellipsometer
SpecEL-2000
Ellipsometry System
 
제조사 Mikropack GmbH
원산지 독일
     
 
Specifications
Wavelength range 380-780 nm (standard) or 450-900 nm (optional)
Optical resolution 4.0 nm FWHM
Accuracy 0.1 nm thickness; 0.005% refractive index
Angle of incidence 70 ˚
Film thickness 1-5000 nm for single transparent film
Spot size 2 mm x 4 mm (standard) or 200 μm x 400 μm (optional)
Sampling time 3-15 seconds (minimum)
Kinetic logging 3 seconds
Mechanical tolerance (height) +/- 1.5 mm, angle +/- 1.0 ˚
Number of layers Up to 32 layers
Reference Not applicable
 
 
 
 
 
07072 서울시 동작구 신대방1가길 38 (신대방 719번지 동작상떼빌) 106동 209호 (주)원우시스템즈
TEL : 02-533-6720, 02-3289-1290  FAX : 02-3289-1293
Santevill 106-209, 38, Shindaebang1ga-gil, Dongjak, Seoul, 07072, South Korea
Copyright 2000-2017 Wonwoo Systems Co.,Ltd. All right reserved